With the rapid increases in traffic on optical telecommunications systems, the MEMS technology is using in vatiable optical attenuator (VOA). MEMS (Micro-Electro-Mechanical Systems) Variable Optical Attenuator uses an electrostatic tilting mirror to change light coupling between input and output fibers. A MEMS variable optical attenuator is provided that is capable of optical attenuation over a full range of optical power. The MEMS variable optical attenuator comprises a microelectronic substrate, a MEMS actuator and an optical shutter. The MEMS variable optical attenuator may also comprise a clamping element capable of locking the optical shutter at a desired attenuation position. The variable optical attenuator is capable of attenuating optical beams that have their optical axis running parallel and perpendicular to the substrate. Additionally, the MEMS actuators capable of supplying the optical shutter with greater displacement distances and, thus a fuller range of optical attenuation. In one embodiment of the invention, the MEMS actuator comprises a thermal arched beam actuator. Additionally, the variable optical attenuator of the present invention may be embodied in a thermal bimorph cantilever structure. This alternate embodiment includes a microelectronic substrate and a thermal bimorph cantilever structure having at least two materials of different thermal coefficient of expansion. The thermal bimorph is responsive to thermal activation and moves in the direction of the material having the lower thermal coefficient expansion. Upon activation, the thermal bimorph intercepts the path of the optical beam and provides for the desired level of optical attenuation. The invention also provides for a method of optical attenuation and a method for fabricating an optical attenuator in accordance with the described structures. Features . Low insertion loss . Low polarization dependent loss . Compact design . Low power consumption . Insensitive to shock and vibration . Telcordia GR-1221-CORE&RoHS compliance with Applications . Power control and equalization in multi channel systems . Gain-tilt control in EDFAs . Receiver protection . OADM FiberStore’s MEMS products base on electrostatic MEMS technology, The reflective mirror MEMS technology enables the creation of products with high attenuation levels and can be capabilities, this results in a new category of MEMS components that are designed to exceed specifications for performance, compactness, manufacturability and reliability. As an professional optica communication products supplier, we also provide optic switch, fiber optic tools and so on.
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vatiable optical attenuator, optic switch, fiber optic tools,
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