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Accordingly, to attain the 1st objective, there exists provided a vacuum dryer, comprising an outer bath, an interior bathtub situated inside the outer bath and into which a semiconductor substrate is loaded, a h2o supply line linked to the interior bath for supplying deionized h2o to your inner bath, an interior bath drain line connected to the interior bath for draining the deionized drinking water filled in the interior bathtub, and a supply pipe linked to the outer bathtub for supplying isopropyl booze vapor for the semiconductor substrate loaded into the internal bath.What is Bad for the Tinge of fluidized bed dryer?. A vacuum dryer is obtained by bettering the above-mentioned IPA vapor dryer.Remarkably! vacuum drying equipment Rank the First in the List of Coolest Coupons for Niece . In the drying approach through which the vacuum dryer is used, the sum of IPA consumed is below that with the IPA vapor dryer. Therefore, it is possible to lessen the degree of environmental air pollution brought on by the IPA. Also, it is possible to acquire a great drying result no matter the presence in the routine. Yet, as being the semiconductor gadget is further built-in, recontamination by particles inside the drying approach in which the vacuum dryer is utilized comes into question. As a result, a strategy for drying a semiconductor gadget by which it really is possible to far more stably prevent recontamination by particles is needed. To accomplish your second goal, there's supplied a approach to drying a semiconductor system. Within the method, deionized drinking water is non-stop provided to an inner bath of a vacuum dryer utilizing IPA vapor comprised of an outer bath, an internal bathtub, and deionized drinking water supplied through drinking water offer lines to fill the interior bathtub together with the deionized water, these that the deionized drinking water is continually overflowed from your internal bath for the outer bath. A semiconductor substrate is loaded into your inner bath-from which the deionized drinking water is continuously overflowed. The loaded semiconductor substrate is dried by supplying the isopropyl booze vapor to your internal bath into which the semiconductor substrate is loaded.
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fluidized bed dryer, vacuum drying equipment,
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